diff --git a/MoonTools.ECS.csproj b/MoonTools.ECS.csproj
index 2f2b5e6..5cd9326 100644
--- a/MoonTools.ECS.csproj
+++ b/MoonTools.ECS.csproj
@@ -1,7 +1,7 @@
 <Project Sdk="Microsoft.NET.Sdk">
 
   <PropertyGroup>
-    <TargetFrameworks>net6.0;net7.0</TargetFrameworks>
+    <TargetFramework>net7.0</TargetFramework>
     <Nullable>enable</Nullable>
     <Platforms>x64</Platforms>
     <AllowUnsafeBlocks>true</AllowUnsafeBlocks>
diff --git a/src/FilterSignature.cs b/src/FilterSignature.cs
index 8fd65ec..3877391 100644
--- a/src/FilterSignature.cs
+++ b/src/FilterSignature.cs
@@ -21,7 +21,25 @@ namespace MoonTools.ECS
 
 		public bool Equals(FilterSignature other)
 		{
-			return Included.SetEquals(other.Included) && Excluded.SetEquals(other.Excluded);
+			// workaround for HashSet<T>.SetEquals generating garbage
+			// maybe fixed in .NET 8?
+			foreach (var included in Included)
+			{
+				if (!other.Included.Contains(included))
+				{
+					return false;
+				}
+			}
+
+			foreach (var excluded in Excluded)
+			{
+				if (!other.Excluded.Contains(excluded))
+				{
+					return false;
+				}
+			}
+
+			return true;
 		}
 
 		public override int GetHashCode()